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Micromechanics and nanoscale effects : MEMS, multi-scale materials and micro-flows /

Authors: Harik, Vasyl Michael.%editor | Luo, Li-Shi.%editor Series: ICASE/LaRC interdisciplinary series in science and engineering ; . v. 10 Published by : Kluwer Academic, (Dordrecht :) Physical details: xv, 240 p. : ill. ; 25 cm. ISBN: 1402019688 Subject(s): Microelectronics. | Microelectromechanical systems. | Actuators. Year: 2004
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Item type Location Call Number Status Date Due
Book Book AUM Main Library 621 381 M626 (Browse Shelf) Available

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